Micro/Nano Processing Technology

Photo showing a pad structure with a penny on top.

A device pad structure, shown with a penny for scale. (Image courtesy of Georgia Tech Center for Low Cost Electronics Packaging Research; photo by Stanley F. Leary. Image provided by the National Science Foundation Image Library.)


MIT Course Number

6.152J / 3.155J

As Taught In

Fall 2005



Cite This Course

Course Features

Course Description

This course introduces the theory and technology of micro/nano fabrication. Lectures and laboratory sessions focus on basic processing techniques such as diffusion, oxidation, photolithography, chemical vapor deposition, and more. Through team lab assignments, students are expected to gain an understanding of these processing techniques, and how they are applied in concert to device fabrication. Students enrolled in this course have a unique opportunity to fashion and test micro/nano-devices, using modern techniques and technology.

Other OCW Versions

Archived versions: Question_avt logo

Martin Schmidt, Susan Ruff, and Robert O’Handley. 6.152J Micro/Nano Processing Technology, Fall 2005. (Massachusetts Institute of Technology: MIT OpenCourseWare), http://ocw.mit.edu (Accessed). License: Creative Commons BY-NC-SA

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